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  • Engineer honored for contributions to industry

    By Tara Chandler
    Published: Oct. 3, 2007
    Engineer

    C. Grant Willson, professor in the Department of Chemical Engineering, has been named recipient of the SEMI Award for 2007. The award honors individuals and teams who have made significant technical contributions to the semiconductor industry. Willson was recognized as the co-inventor of chemically amplified resist, a key technology that has enabled leading edge lithography …

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